Semiconductor & LED Manufacturing Solutions

Seed Chucks, Susceptors, Vessels, Heating Elements, Insulators, Crucibles, Boats & Jigs

Our high-purity graphite components are essential in semiconductor and LED manufacturing, offering exceptional thermal stability, uniform heat distribution, and chemical resistance. Designed for high-temperature environments, they support crystal growth, thin-film deposition, and wafer fabrication with unmatched precision and reliability. Their ability to withstand extreme conditions ensures process efficiency, minimizes contamination, and enhances product quality. Utilizing advanced machining and ultra-high-purity graphite, we provide purified graphite solutions tailored to the stringent demands of semiconductor and LED production, ensuring superior performance, longevity, and consistency in critical manufacturing processes. Our product range includes Seed Chucks, Susceptors, Vessels, Heating Elements, Insulators, Crucibles, Boats, and Jigs, each engineered for durability and precision.

We supply high-purity graphite components for SiC crystal pulling, a crucial process in manufacturing next-generation silicon carbide wafers for power electronics and advanced semiconductor devices. Our graphite solutions enable precise temperature control and thermal uniformity, ensuring optimal crystal growth conditions and superior material quality for high-performance SiC-based technologies.

PECVD Boat

PECVD graphite boats play a vital role in thin-film deposition, providing the stability and conductivity required for precise semiconductor coatings. Their high thermal and electrical performance ensures efficient plasma-enhanced chemical vapor deposition (PECVD), where controlled wafer spacing and optimized electrode configurations enable uniform SiNx layer formation. Designed for durability and process consistency, these high-purity graphite carriers enhance wafer quality, minimize contamination, and support high-yield manufacturing in demanding coating applications.

This solution supports dielectric and semiconductor film deposition in semiconductor fabrication, along with anti-reflective coatings for solar panels and optical layers in optoelectronics. Engineered for thermal stability and chemical resistance, they are securely packaged to maintain purity and integrity.